Home > Products > Spectrometer > Echelle spectrometer

ELIAS

Related Applay:

Intensity dynamics

Highest spectral resolution

Very high imaging quality

Simple and error-free operation

World’s leading commercial echelle spectrometer series in Littrow configuration with highest spectral resolution – for highly resolving spectral characterization of emission and absorption lines in particular for excimer laser lithography.

166 000 75669HOTLINE
WeChat Service

Introduction FAQ Related Products Related Applications

  • SETUP

The ELIAS Emission Line Analyzing Spectrometers belong to a worldwide unique monochromator series which provide quantitatively high-resolution spectral analysis of narrow linewidth laser profiles with intensity dynamics of up to 4 orders. By applying CCD detectors with a signal-to-noise ratio of up to 40,000, the line profiles can be detected simultaneously within their spectral vicinity. The patented optical design with echelle grating features a nearly diffraction-limited imaging and a sufficiently high linear dispersion to resolve the halfwidths of the lines with 5-10 pixels considering the typical pixel widths of the line-array detector. A 360 mm wide echelle grating within a Littrow arrangement can be used alternatively in a single, double or even quadruple pass ELIAS setup. This allows to work either with an extremely high resolving capability for profile characterization or with a reduced resolving capability but larger inspection range and higher sensitivity. By a 2.5 m off-axis paraboloid and the accompanying anarmophotic magnification optics with a tangential image reproduction scale of 4:1, a camera focal distance of 10 m is attained.

 

The ELIAS spectrometers are extremely thermally and mechanically stable. All models are equipped with fully motorized optomechanics for the automatic focusing and positioning of the spectrum on the detector. By applying reflection optics with broadband UV layers, chromatic aberrations are avoided. The light coupling into the spectrometer is realized via SMA fiber or reflection transfer optics.

The supplied operating software Sophi with optional LabVIEW library for complete remote control of the ELIAS allows fully access of all spectrometer-detector functions via graphic user interface. A scan mode provides the sequential measurements of a larger wavelength range, larger than the free spectral range at a time.


ModelELIAS I
ELIAS VUV
ELIAS IIELIAS IIIELIAS-LDWAVEMETER
Passsingledoubledoublequadruplesingledouble
Wavelength [nm]λsimul [pm]λsimul [pm]λsimul [pm]λsimul [pm]λsimul [pm]λsimul [pm]λsimul [pm]
157451415249
193481516.48.41705250
248642022.511.522771
266732529.71527592
5321464959.429.9551185
7662448292.547.5846293
1,06429298200101626
Wavelength [nm]FWHM [pm]FWHM [pm]FWHM [pm]FWHM [pm]FWHM [pm]FWHM [pm]FWHM [pm]
1570.2540.0830.310.10
1930.2830.0860.0600.0300.340.110.34
2480.3760.1170.0820.0410.460.15
2660.4280.1470.1120.0560.550.19
5320.8560.2940.2250.1121.100.37
7661.4000.4820.3390.1701.700.59
1,0641.7110.5880.4500.2251.25




 

  • 什么是稳温内参比激光器?

    博里叶变换光谱仪的波长刻度精度依赖于其内部基准激光器。在我们的紧凑型FT光谱仪中,参考激光器为固态类型,其中心

    波长具有自然低温引起的漂移,约70 ppm/℃。在某些应用中,这就足够了。但在其他应用中,必须通过光谱仪实现更可再现的波长尺度。通过激光器的温度稳定性(通过热电元件),可在整个仪器工作温度范围(5-40°c)内保证波长重现性10ppmo举个例子,在1000mm波长处,10ppm的偏移意味着I0E-6*1000nm-0.01nm。这对于激光表征或化学计里分析等应用尤为重要。